A Brief Note from Alkemie to Chemistry

The Structure of a-Al₂O₃ (0001) surface:

United States
Patent application Publication
Toofan Jahan.; Toofan Mahm.
Pub. No.: US 2009/0077825 A1
Pub. Date: Mar. 26, 2009
Abstract Title:
An apparatus and a method are described to dry solid objects (semiconductor wafer) being manufactured in a chain of steps.